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发明名称
EXPOSURE DEVICE WITH MASK MATCHING MECHANISM AND MATCHING, EXPOSING, AND CARRYING METHOD FOR WORK
摘要
申请公布号
JPH0843950(A)
申请公布日期
1996.02.16
申请号
JP19940178863
申请日期
1994.07.29
申请人
ORC MFG CO LTD
发明人
AIKAWA NOBUTOSHI;MORITA AKIRA
分类号
G03B27/18;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G03B27/18
主分类号
G03B27/18
代理机构
代理人
主权项
地址
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