Purifying gases passed into excimer laser chamber

摘要

The gases being passed into a laser chamber can be purified by a purifying agent (34) in container(s) (36), linked, in a closed system, to the laser chamber (10) in its housing (12) and the gas reservoir(s) (20) by pressure valves (22) and pipework (24). The purifying agent is located between the reservoir(s) and the laser chamber (10). Also claimed is such an apparatus and method where purifying agent is located in the laser chamber.