METHOD FOR MAKING MAGNETORESISTIVE TRANSDUCERS

摘要

A method for using microlithography to form columns with side surfaces to be provided with an insulating coating and top surfaces having no insulating coating, in magnetic metal multilayers deposited by cathode sputtering or molecular beam epitaxy, so that a current can be circulated perpendicularly to the plane of the layers and the phenomenon of perpendicular giant magnetoresistance can be used. The method comprises a first step of forming on the surface of a substrate (10) a stack consisting of a first conductive layer (8) contacting the substrate, and alternating magnetic layers and non-magnetic metal layers forming a magnetic metal multilayer (7) contacting the conductive layer (8); a second step of forming a second conductive layer on the magnetic metal multilayer (7); a third step of forming a first resin mask (12, 18) having the same size as a magnetoresistive sensitive element to be produced; a fourth step of etching around the mask of the second conductive layer and the magnetic metal multilayer (7); a fifth step of depositing an insulating layer on the structure; a sixth step of lifting off the resin mask and the insulating layer thereon; and a seventh step of restoring contact (21) on the second conductive layer.