| 摘要 |
PURPOSE: To provide a focus adjusting mechanism of a microscope which is capable of making focus adjustment with high accuracy, has excellent rapid responsiveness, is capable of exactly dealing with materials to be inspected varying in thicknesses and is capable of making focus adjustment without readjustment and replacement of sensors. CONSTITUTION: This focus adjusting mechanism of the microscope executes focus adjustment by moving a revolver 9 or stage of the microscope in an optical axis (a) direction. The mechanism includes a rough adjusting base 3 which is disposed freely movably in the optical axis (a) direction at a microscope body 1, a rough adjusting mechanism which roughly moves the rough adjusting base 3, a fine adjusting base 8 which is disposed freely movably in the optical axis (a) direction at the rough adjusting base 3 and supports the revolver 9 or the stage at one end, a displacement generating element 11 which finely adjusts the fine adjusting base 8 relative to the rough adjusting base 3, a sensor 16 which detects the relative position of the fine adjusting base 8 relative to the rough adjusting base 3 by the displacement generating element 11 and a means which executes closed loop control of the displacement generating element 11 so as to align the relative position detected by the sensor 16 to the preset target value of the fine adjustment. |
