Flow meter using capacitance differential pressure sensor

摘要

A flow meter consisting of a channel (7) with a cross- sectional narrowing, a capacitance differential pressure sensor (4) and a read-out (6) uses capacitor plates (1,2,3) made from springy sheet metal coated with an electrically non-conductive layer (5), preferably glass. Alternatively, only the central plate (2) need be made from springy thin metal.