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发明名称
Ätztrommel für Scheiben und automatische Umladevorrichtung für Scheiben.
摘要
申请公布号
DE69206062(T2)
申请公布日期
1996.07.18
申请号
DE19926006062T
申请日期
1992.06.01
申请人
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP
发明人
HASEGAWA, FUMIHIKO, URAWA-SHI, SITAMA-KEN, JP;YAMAMOTO, TATSUYA, SHIRAKAWA-SHI, FUKUSHIMA-KEN, JP;SATO, SHINJI, NISHI-SHIRAKAWA-GUN, FUKUSHIMA-KEN, JP
分类号
H01L21/00;H01L21/677;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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