| 摘要 |
PURPOSE: To obtain a radiation sensitive resin compsn. hardly causing a change in the dimensions of a pattern and having superior focus latitude and heat resistant transparency by using a polymer contg. specified units each having a carboxyl group, a radiation sensitive acid generating compd. and a compd. having an acid-crosslinkable group. CONSTITUTION: This radiation sensitive resin compsn. contains a polymer contg. structural units each having at least one carboxyl group represented by formula I, an acid generating compd. which generates an acid when irradiated and a crosslinkable compd. having one or more groups which are crosslinked by the generated acid. In the formula I, each of R<1> -R<4> is H, 1-10C alkyl, 6-20C aryl, carboxyl or a group represented by formula II, III, IV, etc., and at least one of R<1> -R<4> is a group represented by the formula II, III, IV, etc. In the formula II-IV, each of n1-n3 is an integer of 1-5. |
