发明名称 CONTROLLING METHOD FOR MANUFACTURING EQUIPMENT AND MANUFACTURING CONDITION
摘要 PURPOSE: To reduce the experimental amount and obtain the optimum processing conditions by obtaining the value of an error evaluation function S(C) and its first order partial differentiation coefficient under initial processing conditions C deg. through processing experiments and obtaining the second and higher order partial differentiation coefficients under C deg. by means of a theoretical model, and finding the functional form of S(C) near the minimum conditions Cmin for the second and higher order partial differeatial coefficients. CONSTITUTION: The processing condition optimizing computer 105 supplies only signals of processing conditions expected to be suitable for a requester's demand at an initial stage, signals of processing conditions obtained by altering one component of vectors expressing the initial processing conditions C deg. at, and sendonly the predicted optimum processing condition signals to processing condition controlling and setting devices 107, 108, 109. With the use only of quality data of products manufactured under the above processing conditions and data obtained from a process predicting computer 106, the computer 105 predicts the functional form of the error evaluation function S(C) near the minimum conditions Cmin and predicts the optimum process conditions.
申请公布号 JPH08250384(A) 申请公布日期 1996.09.27
申请号 JP19950053941 申请日期 1995.03.14
申请人 HITACHI LTD 发明人 IRIE RYOTARO;KUMIHASHI KOSEI;TAKEMURA YOSHIAKI;USHIO JIRO;MARUIZUMI TAKUYA
分类号 C23C14/24;C23C16/52;C23F4/00;G05B13/02;G05B23/02;H01L21/00;H01L21/02;H01L21/203;H01L21/205;H01L21/22;H01L21/66;(IPC1-7):H01L21/02 主分类号 C23C14/24
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