METHOD OF REMOVING UNDESIRED PARTICLES FROM A SURFACE OF A SUBSTRATE,申请号KR19870008113-传众专利搜索

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发明名称	METHOD OF REMOVING UNDESIRED PARTICLES FROM A SURFACE OF A SUBSTRATE
摘要
申请公布号	KR960013142(B1)	申请公布日期	1996.09.30
申请号	KR19870008113	申请日期	1987.07.25
申请人	N.V. PHILIPS' GLOEILAMPENABRIEKEN	发明人	ADRIAAN FRANCISCUS MARIA LEENAARS
分类号	H01L21/304;B08B3/00;B08B3/10;B08B7/00;H01L21/00;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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