发明名称 |
Method of making tunable semiconductor laser |
摘要 |
In a method of making a tunable twin guide (TTG) type tunable semiconductor laser, over the surface of a semiconductor substrate (5) of one conductivity type, a tuning layer (22), a central layer (23) of the opposite conductivity type, and an active layer (24) are sequentially deposited over one another by a selective epitaxy method such as metal organic vapor phase epitaxy (MOVPE). Each layer is stripe-shaped. This method differs from conventional methods in which the processing of semiconductor elements for defining the current path/optical waveguide inside the laser is carried out by etching. <IMAGE> |
申请公布号 |
EP0527615(B1) |
申请公布日期 |
1996.11.13 |
申请号 |
EP19920307256 |
申请日期 |
1992.08.07 |
申请人 |
NEC CORPORATION |
发明人 |
SAKATA, YASUTAKA;YAMAGUCHI, MASAYUKI;SASAKI, TATSUYA |
分类号 |
H01S5/00;H01S5/042;H01S5/062;H01S5/10;H01S5/227 |
主分类号 |
H01S5/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|