| 摘要 |
PURPOSE: To improve a Josephson junction of planar structure in reproducibility of critical current, density preventing small particles from being generated by a method wherein a wiring pattern of oxide conductor thin film is formed of NdBaCuO material. CONSTITUTION: An electrode 2 of oxide superconductor thin film and a narrow pattern 3 are formed on a board 1, and furthermore a belt-like deteriorated region 4 serving as a tunnel barrier low in superconductivity is formed. At this point, oxide superconductor is represented by a formula, NdBa2 Cu3 O7-y (O<=y<=0.5). The wiring pattern 3 and the deteriorated region 4 are formed smaller than 300mm in width. NdBa2 Cu3 O7-y is comparatively less affected by a change in composition, has such properties that it grows in clear single crystal, and prevents a large number of small particles from being generated. By this setup, a part of the deteriorated region serving as a tunnel barrier is restrained from becoming uneven in quality, so that a Josephson junction of this constitution can be enhanced in reproducibility of critical current density.
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