发明名称 REMOVING SOLUTION COMPOSITION FOR RESIST
摘要 PURPOSE: To obtain a removing soln. compsn. having a low viscosity, excellent in degenerated film removing property and enhancing corrosion preventing effect by incorporating N,N-diethylhydroxylamine, hydroxylamine, a water-soluble org. solvent, an anticorrosive and water in a specified ratio. CONSTITUTION: This removing soln. compsn. contains 2-30wt.% N,N-diethyl- hydroxylamine, 2-40wt.% hydroxylamine, 10-80wt.% water-soluble org. solvent, 1-20wt.% anitcorrosive and 2-30wt.% water. The N,N-diethylhydroxylamine is a compd. represented by N(C2 H5 )2 OH, the hydroxylamine is a compd. represented by NH2 OH and the water-soluble org. solvent is an org. solvent miscible with water, e.g. dimethylsulfoxide because the compds. exist as an aq. soln. The anti-corrosive is preferably selected from among arom. hydroxy compds. such as phenol and pyrocatechol, acetylene alcohol, a carboxyl group- contg. org. compd., its anhydride, etc.
申请公布号 JPH08334905(A) 申请公布日期 1996.12.17
申请号 JP19950166835 申请日期 1995.06.08
申请人 TOKYO OHKA KOGYO CO LTD 发明人 WAKIYA KAZUMASA;KOBAYASHI MASAICHI;TANABE MASAHITO;NAKAYAMA TOSHIMASA
分类号 G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
代理机构 代理人
主权项
地址