Method for producing partly movable micro structure(s)
摘要
The method concerns production of a partly movable micro-structured object (5) out of a multi-layer system including at least one sacrificial layer (2). It is characterised by the fact that removal of the sacrificial layer takes place by dry-chemical etching in plasma.
申请公布号
DE19522004(A1)
申请公布日期
1997.01.02
申请号
DE1995122004
申请日期
1995.06.21
申请人
INSTITUT FUER MIKROTECHNIK MAINZ GMBH, 55129 MAINZ, DE
