发明名称 STORAGE DEVICE AND CARRIER
摘要 PURPOSE: To provide a storage device which can surely and readily displace atmosphere in an inside space of a storage container only by mounting a storage container on a mounting part of a supply device. CONSTITUTION: First and second joints 5, 7 are provided to a bottom part 1a of a storage container 1 and third and fourth joints 10, 12 are provided to a mounting part 8a of a supply device 8. When the storage container 1 is mounted on the mounting part 8a, the first and second joints 5, 7 are connected to the third and fourth joints 10, 12, respectively, displacement gas is introduced to an inside space 2 of the storage container 1 through a supply path 9 and an introduction path 4, gas is exhausted from the inside space 2 through a lead out path 6 and an exhaust path 11 and atmosphere of the inside space 2 is displaced.
申请公布号 JPH0917851(A) 申请公布日期 1997.01.17
申请号 JP19950162508 申请日期 1995.06.28
申请人 FUJITSU LTD;FUJITSU VLSI LTD 发明人 SATO KATSUHIRO
分类号 B65D85/86;H01L21/673;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D85/86
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