NON-CONTACT TYPE MOVING TABLE SYSTEM

摘要

A non-contact type moving table system comprising a guide table and a moving table. The guide table and the moving table have air holes and vacuum holes on the surfaces facing each other, and compressed air is blown out of the air holes so that a space is created between the moving table and the guide tale, thus the moving table can move above the guide table without making contact with the guide table. In addition, vacuum suction is applied between the guide table and the moving table so that the moving table is stabilized on the guide table. Several modifications are obtained by combining pairs of the guide table and the moving table so that the moving table is moved in any desired horizontal direction. The non-contact type moving table can be simple in structure, compact in size, light in weight and is manufactured at low costs.