SEMICONDUCTOR DEVICE MANUFACTURING METHOD,申请号JP19950268160-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要
申请公布号	JPH09115866(A)	申请公布日期	1997.05.02
申请号	JP19950268160	申请日期	1995.10.17
申请人	MITSUBISHI ELECTRIC CORP	发明人	MAEKAWA KAZUYOSHI
分类号	H01L21/28;H01L21/304;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):H01L21/304;H01L21/320	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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