Wavefront measuring system with integral geometric reference (IGR)

摘要

A geometric sensor includes a Monolithic Lenslet Module (MLM) subaperture array having a plurality of microlenses, each of which have an opaque center formed concentric with the microlens optical axis, at the location of the lens chief ray, to produce an integral geometric reference (IGR) spot pattern of the lens array which is used to correct for sensor errors to an accuracy comparable with that achieved with reference plane wave calibration.