发明名称 Semiconductor device with a low resistance ohmic contact between a metal layer and a sic-layer
摘要 The present invention is a semiconductor device comprising a semiconductor layer of SiC, a metal layer adapted to form a low resistance ohmic contact with the SiC-layer and a thin layer of a material having a smaller bandgap than the SiC of the SiC-layer and is placed between the SiC-layer and the metal layer. The SiC-layer is highly doped at least in the region next to the thin layer, and the material of the thin layer is a Group 3B-nitride including indium and at least another Group 3B-element.
申请公布号 US5652437(A) 申请公布日期 1997.07.29
申请号 US19960602045 申请日期 1996.02.15
申请人 ABB RESEARCH LTD. 发明人 HARRIS, CHRISTOPHER
分类号 H01L21/04;H01L29/45;(IPC1-7):H01L31/031 主分类号 H01L21/04
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