DOUBLE MESA LARGE AREA AlInGaBN LED DESIGN FOR DEEP UV AND OTHER APPLICATIONS

摘要

Methods are provided for forming AlInGaBN material. The method can include growing an AlInGaBN layer on a substrate; removing a portion of the AlInGaBN layer from the substrate to define a plurality of AlInGaBN islands on the substrate; and growing a highly doped-AlInGaBN layer on each of the AlInGaBN islands.