METHOD FOR MANUFACTURING AN ARRAY OF MICROELECTRODES

摘要

The method for manufacturing an array of microelectrodes on an electrically insulated top surface of a substrate comprises the following sequence of steps. A thin layer of a metal or metal alloy is deposited by laser ablation onto the top surface of the substrate and through openings of a mask provided on this top surface. The array of microelectrodes is then revealed by removing the mask from the top surface. Advantageously, the method according to the present invention allows to manufacture microelectrodes made of any metal even inert metals and metal alloys and disposed in a precise design.