| 摘要 |
<p>1. In a target for magnetron sputtering apparatus of a cobalt-based alloy containing further elements in concentrations so that intermetallic phases are formed with at least one of these elements and intermetallic phases are observed in the equilibrium state at the operating temperature of the target because of the phase diagram, the grain boundaries, subgrain boundaries or slip bands of the cobalt solid solution forming the matrix are dressed with the elements forming the intermetallic phases, with the reflections in the X-ray diffraction pattern of the target showing an intermetallic phase which is essentially absent in the cast state and only forms on ignition in the temperature range below the solidus temperature of the alloy by a solid-state reaction.</p> |
