发明名称 Resist composition
摘要 A resist composition comprising in admixture (A) a compound which forms an acid upon exposure to active rays, (B) a polymer which has at least one structural unit with a group unstable to an acid and cleaves at this group in the presence of the acid derived from the compound (A) to turn alkali-soluble, and (C) a phenolic compound, and a process for forming a resist pattern using this resist composition are provided.
申请公布号 US5688628(A) 申请公布日期 1997.11.18
申请号 US19940339203 申请日期 1994.11.10
申请人 NIPPON ZEON CO., LTD.;FUJITSU LTD 发明人 OIE, MASAYUKI;ABE, NOBUNORI;TANAKA, HIDEYUKI;OIKAWA, AKIRA;MIYATA, SHUICHI
分类号 G03F7/039;G03F7/004;G03F7/023;H01L21/027;(IPC1-7):G03F7/021 主分类号 G03F7/039
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