发明名称 |
Chuck assembly having a controlled vent |
摘要 |
A chuck assembly for engaging the inner surface of a hollow substrate including: (a) a body defining a hole, wherein the hole is positioned to be in communication with the air inside the substrate; and (b) a gas pressure regulating apparatus coupled to the hole for regulating the gas pressure inside the substrate.
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申请公布号 |
US5688327(A) |
申请公布日期 |
1997.11.18 |
申请号 |
US19960607064 |
申请日期 |
1996.02.26 |
申请人 |
XEROX CORPORATION |
发明人 |
SWAIN, EUGENE A.;SCHMITT, PETER J. |
分类号 |
B05C13/02;(IPC1-7):B05C13/00 |
主分类号 |
B05C13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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