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发明名称
METHOD OF CHEMICALLY/MECHANICALLY MAKING WORK PLANAR
摘要
申请公布号
JPH09306879(A)
申请公布日期
1997.11.28
申请号
JP19960251435
申请日期
1996.09.24
申请人
IND TECHNOL RES INST
发明人
CHIN RAIJIYO
分类号
H01L21/306;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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