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发明名称
摘要
申请公布号
JP2686456(B2)
申请公布日期
1997.12.08
申请号
JP19880009593
申请日期
1988.01.21
申请人
发明人
分类号
H01L21/22;H01L21/31;(IPC1-7):H01L21/22
主分类号
H01L21/22
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