发明名称 |
DISPOSITIF DE POMPAGE PAR GETTER NON EVAPORABLE ET PROCEDE DE MISE EN OEUVRE DE CE GETTER |
摘要 |
The invention discloses a pumping device by non-vaporisable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterised in that it comprises a thin layer of non-vaporisable getter coated on at least almost the whole metal wall surface defining the chamber.
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申请公布号 |
FR2750248(A1) |
申请公布日期 |
1997.12.26 |
申请号 |
FR19960007625 |
申请日期 |
1996.06.19 |
申请人 |
ORGANISATION EUROPEENNE POUR LA RECHERCHE NUCLEAIRE |
发明人 |
BENVENUTI CRISTOFORO |
分类号 |
H05H7/00;F04B37/02;H01J7/18;H01J9/18;H01J41/12;H05H13/04;(IPC1-7):H01J41/12;H01J9/38;F04B37/04;F04B37/14 |
主分类号 |
H05H7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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