| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor capable of detecting the direction and amplitude of vibrations with accuracy. SOLUTION: A light receiving part which receives the outgoing light of a light source 1 is provided with a quartered photo diode(PD) 2 with light receiving planes A, B, C and D quartered in 2×2 in directions X and Y. The PD 2 is supported via four wires 4 so as to be rockable in the directions X and Y relative to a base 3. When objects to be detected (the light source 1 and base 3) vibrate, the PD2 vibrates in a direction orthogonal to the optical axis of the light source 1, and a spotlight is displaced from the center of the light receiving planes A, B, C and D according to the direction and magnitude of the vibrations. Then the direction and amplitude of the vibrations are calculated on the basis of the detection currents of the light receiving planes A, B, C and D.
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