发明名称 Positive working photoresist composition
摘要 Provided is a positive working photoresist composition which comprises a 1,2-quinonediazide compound and an alkali-soluble resin obtained by condensing a specified phenol compound, formaldehyde and a specified aromatic aldehyde having at least one alkoxy substituent and at least one hydroxy substituent.
申请公布号 US5709977(A) 申请公布日期 1998.01.20
申请号 US19960677143 申请日期 1996.07.09
申请人 FUJI PHOTO FILM CO., LTD. 发明人 TAN, SHIRO;KAWABE, YASUMASA
分类号 G03F7/023;(IPC1-7):G03F7/023 主分类号 G03F7/023
代理机构 代理人
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