Kondensator mit einer Sauerstoff-Barriereschicht und einer ersten Elektrode aus einem Nichtedelmetall

摘要

A capacitor with a high epsilon dialectric or ferroelectric layer as a capacitor dialectric and a first electrode, substantially made out of conductive material free from noble metal. A barrier layer to suppress oxygen diffusion is placed between the capacitor dialectric and the first electrode. Known materials such as polysilicon or aluminium can thus be integrated as electrode material with high epsilon dielectric or ferrorelectric properties.