CERAMIC SENSOR WITH BUILT-IN HEATER

摘要

PROBLEM TO BE SOLVED: To provide a ceramic sensor enhanced in the durability to heat stress by smoothly forming the surface of the ceramic substrate in the vicinity of a heater built in part. SOLUTION: A ceramic sensor 50 has such a structure that a detection element part 41 constituted of an oxide semiconductor is integrally formed to the surface of a ceramic substrate 36 and the heater 38 for heating the detection element part 41 is built in the ceramic substrate 36 and the surface roughness of at least the side surface 36c of the ceramic substrate 36 is set to 25 umRmax or less. A large number of small ceramic particles 21 are fixed to the bonding surface of the detection element part 41 with the ceramic substrate 36 in a dispersed state and a region where ceramic small particles 21 are not fixed is formed to the part having predetermined width (w) containing the edge on the side of the side surface 36c.