| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer take out apparatus capable of surely detecting wafers doubly taken out even in a worse environment. SOLUTION: A wafer Wa taken out from a cassette is laid on a susceptor 84. This causes the susceptor to be loaded in the gravitational direction. A load sensor 83 detects the load on the susceptor to output the load value to a CPU 87 which compares it with a previously input reference value to judge if wafers are doubly taken out. If the wt. of one wafer is set to a reference value, the CPU judges that wafers are doubly taken out when the detected wt. exceeds the reference. |
