| 摘要 |
PROBLEM TO BE SOLVED: To increase the productivity with low no. of particles comparative to a low particle apparatus by using a buffer robot and a transfer robot and making each robot access to one or more treating chambers via slit valves. SOLUTION: Before a buffer robot 13 transfers a second wafer to an intermediate chamber 19 from a first load lock chamber 37, a transfer robot 17 turns to open a first transfer chamber slit valve 27, extends to a first treating chamber 25 via this valve 27, leaves a first wafer therein and shrinks with the slit valve 27 closed. Before the transfer robot 17 transfers the second wafer from the intermediate chamber 19 to a second treating chamber 31, the buffer robot 13 moves to the lock chamber 37 and picks up a third wafer. Thus the number of particles entering the treating chambers is minimized and hence the robot motion is synchronized with the open-close of the slit valve 27. |
