发明名称 DEVICE-MANUFACTURING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To simplify the version-up and -down of a software when altering the versions of the software by providing a means for the increase or decrease of the parameter IDs and their attribute information a means for the delection of the parameters from a parameter file and a means for the substitution of the data of default values, etc. SOLUTION: In respective storages 401, 402 for versions A, B, both respective parameter files 403, 404 including a number of processing information such as exposures, etc., and respective parameter-file constituting files 405, 406 are stored respectively. When the file C403 for the version A is altered to the file D404 for the version B, a console CPU reads a parameter from the file C403. If the read parameter is absent in the parameter-file constituting file E405, it is deleted from the file C403. On the other hand, when parameters included only in the parameter-file constituting file E405 are present, their parameter IDs and default values are stored additionally in a parameter file C'407. By these processings, in the case of the version alteration, the parameter file C'407 present outside the storage 402 for the version B is read in the storage 402 for the version B to be used as the parameter file D404.
申请公布号 JPH10125587(A) 申请公布日期 1998.05.15
申请号 JP19960294671 申请日期 1996.10.17
申请人 CANON INC 发明人 YASUFUKU YUJI
分类号 G06F9/06;G06F12/00;H01L21/02;H01L21/027;(IPC1-7):H01L21/027 主分类号 G06F9/06
代理机构 代理人
主权项
地址