| 发明名称 |
Oxide insulator film having a layered structure. |
| 摘要 |
<p>The invention provides an oxide insulator film having a layered structure comprising at least two layers (32, 33) formed of oxide insulators having temperature properties different from each other. The insulator layers preferably comprise at least one ferroelectric layer. <IMAGE></p> |
| 申请公布号 |
EP0847092(A1) |
申请公布日期 |
1998.06.10 |
| 申请号 |
EP19970402922 |
申请日期 |
1997.12.03 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LIMITED |
发明人 |
NAKAMURA TAKAO;IIYAMA, MICHITOMO |
| 分类号 |
C23C14/08;C30B29/22;H01L39/02;H01L39/14;H01L39/24;(IPC1-7):H01L39/14;C04B35/46 |
主分类号 |
C23C14/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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