CHARGE CONVERSION FILM FOR ION BEAM

摘要

The purpose of the present invention is to provide a charge conversion film that is for an ion beam, that is unlikely to suffer from damage or become radioactive even under the use of a high-strength beam, that has high durability, and that makes it easy to control film thickness so as to be less than 10 µm. The present invention is a charge conversion film that is for an ion beam, that has a thickness of less than 10 µm but at least 100 nm, and that is either a single layer body or a multilayer body of a charge conversion film for an ion beam comprising 96 at% or more of a carbon component and having a thermal conductivity of 800W/mK or more in the film surface direction at 25 °C.