| 摘要 |
A voice coil motor has a flux return housing with at least one magnet and a soft iron cantilevered core. A coil holder, including an electrical coil spaced from magnet, is telescoped over the core with an air gap between the sides of the coil holder and the sides of core. The coil holder has an open end and a closed end forming with the distal end of the core a pressurized air bellows, which can vertically support a payload such as a Z-axis motion stage. The coil holder is telescopically movable with respect to the core along the air gap supplied with pressurized air through longitudinal air ducts in the core and through transverse orifices extending from the ducts to the air gap. A regulator is connected to a core central bore for adjusting pressure in a bellows chamber between the coil holder closed end and the distal end of the core for supporting the payload.
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