发明名称 Coating chamber planetary gear mirror rotating system
摘要 A optical surface is mounted on a mirror rotating system having a carousel therein having gears which rotates said optical surface in a circular path while the optical surface itself rotates about an axis. The radius between the mirror support and the planetary gear is adjustable. The system is mounted on support legs within the vacuum chamber so that the optical surface can face downward when the apparatus is placed in a bell jar (or any such environment which provides a vacuum). A source of vaporized substance is placed under the apparatus, so that the optical surface, facing downward, is facing said source. This arrangement allows for an improvement in the uniformity of the substance deposited on the optical surface.
申请公布号 US5776256(A) 申请公布日期 1998.07.07
申请号 US19960725226 申请日期 1996.10.01
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE 发明人 BORN, TERRY D.;O'CONNELL, DANIEL
分类号 C23C14/50;(IPC1-7):C23C16/00 主分类号 C23C14/50
代理机构 代理人
主权项
地址