| 摘要 |
PROBLEM TO BE SOLVED: To produce a resistor with low inductance having a flat structure by adhering a superconductive layer to a base layer, providing a pattern for mutual connecting area on the superconductive layer, converting a part of the area to a resistor material area, and providing the resistor material area and superconductive layer in the same plane. SOLUTION: A flat resistor 10 is formed by adhering a superconductive layer 12 to a base layer 14 and further adhering a conductive layer 22 to the superconductive layer 12, forming a double layer structure 24. Then a pattern for mutual connecting area 16 is provided on the double layer structure 24, and the mutual connecting area of the double layer structure 24 is converted to a resistor material area of low value. The resistor material area and the structure 24 are formed substantially in the same plane. In addition, after the converting step of the resistor material area, a resist pattern is formed, and the upper metal area of the double layer structure is removed through etching, forming a resistor of high value. Thus, both high-value resistor and low-value resistor can be formed in the same plane.
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