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发明名称
FORMATION METHOD FOR CONTACT IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0147870(B1)
申请公布日期
1998.11.02
申请号
KR19940027132
申请日期
1994.10.24
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
LEE, CHANG-JAE
分类号
H01L21/28;H01L21/285;H01L21/44;H01L21/60;H01L21/768;H01L23/522;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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