Precision fluid head transport

摘要

A method of treating a substrate including providing a fluid treatment apparatus including a first sheet of material having a plurality of spaced apart drive rod receiving passages extending therethrough and through an upper surface thereof. An inside surface of each drive rod passage provides a bearing surface for a drive rod. At least one fluid passage is provided between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods at least partially extend above the upper surface of the first sheet. A second sheet of material has a plurality of spaced apart drive rod receiving passages extending therethrough and through a lower surface thereof. An inside surface of each drive rod passage provides a bearing surface for a drive rod. At least one fluid passage is provided between the drive rod passages. A drive rod is inserted into each drive rod passage. The drive rods at least partially extend below the upper surface of the second sheet. The second sheet is arranged over the first sheet, such that the drive rods of the first and second sheets face each other. A drive mechanism rotates a plurality of the drive rods. A fluid supply apparatus supplies fluid to the fluid injector passages. The apparatus also includes a fluid source. A substrate to be treated is caused to pass between the upper and lower substrate transportation and fluid heads. A fluid is caused to flow through the fluid injector passages to treat the substrate.