DEVICE FOR ADJUSTING OPTICAL AXIS OF X RAYS

摘要

PROBLEM TO BE SOLVED: To make it possible to identify detailed intensity profiles of X-ray beams and positions of beam paths with a precision of 1 mm or less. SOLUTION: By varying the intensity of an X-ray beam 1 of an X-ray domain while shielding it little by little against soft X rays with board 2 with a sharp knife edge and a wire, the distribution of beam intensity is measured, the central position of the beam is accurately measured and the position of the X-ray beam 1 is marked with the same accuracy in a space with the position of the edge. This makes it possible to measure an actual path of an X-ray beam accurately and easily and adjust each optical component of a beam line device quickly and accurately.