| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer carrier and method of aligning a wafer which reduces the apparatus installing area, increases the degree of design freedom and simplifies the structure to align the wafer at a high accuracy and carry it. SOLUTION: The apparatus comprises a multi-joint robot arm mechanism 11 having a third arm 19 rotatable with center at a measuring table 22 on which a wafer 2 positioned, and sensor 13 rotatable together with the third arm 19 against the wafer 1, for outputting a signal corresponding to the outline of the wafer 1; the drive of the arm mechanism 11 is controlled according to the output of the sensor 13 so as to carry the wafer 1 after being aligned. |
