| 摘要 |
<p>PROBLEM TO BE SOLVED: To move a wafer freely without being limited in movement range, while keeping a wafer vacuumed by installing a suction device in a pincette itself. SOLUTION: A vacuum device is fixed to a portable tweezers and a tip part of the tweezers is arched. A wafer is held so that an outer circumferential part of a wafer comes into contact with a surface with numerous holes in an arched tip part of a pincette 103. A rubber ball 101 is squeezed to emit air inside a ball, while a wafer is being held. In the process, a finger at an opening/closing port 104 is kept apart from the port for easily emitting air. Then, after the port 104 is closed by a finger, fingers are let go of the rubber ball 101 at once, and the squeezed ball returns to its original shape. Since air does not enter from an opening/closing port, vacuum condition is realized and a wafer is vacuumed by a tweezers and fixed.</p> |
