发明名称 |
Fabrication system and method having inter-apparatus transporter |
摘要 |
Disclosed is a fabricating system including a plurality of processing apparatuses connected to each other by means of an inter-apparatus transporter, wherein one group of semiconductor wafers are processed in processing apparatuses and other group of wafers are transported to specified processing apparatuses for a time interval from (To+T) to a time To; and another group of wafers are processed and the remaining group of wafers are transported for a time interval from (To+T) to (To+2T). Since processing apparatuses can receive at least one of works from the inter-apparatus transporter for a time interval T min, the distribution of works from the transporter to processing apparatuses is completed for the time interval T min. The transporter is emptied for each time interval T min, and works are unloaded to the emptied transporter, which makes easy the scheduling, control and management of the transporting of a plurality of works in the fabricating system. Moreover, since the fabricating system including processing apparatuses is periodically controlled at a cycle time T min, the scheduling of a plurality of works can be made easy, to enhance the level of optimization, thus improving the productivity.
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申请公布号 |
US5858863(A) |
申请公布日期 |
1999.01.12 |
申请号 |
US19960722944 |
申请日期 |
1996.09.27 |
申请人 |
HITACHI, LTD. |
发明人 |
YOKOYAMA, NATSUKI;KAWAMOTO, YOSHIFUMI;MURAKAMI, EIICHI;UCHIDA, FUMIHIKO;MIZUISHI, KENICHI;KAWAMURA, YOSHIO |
分类号 |
B65G49/07;B23Q41/00;B23Q41/02;C23C14/56;C23C16/54;G05B19/418;H01L21/00;H01L21/02;H01L21/027;H01L21/205;H01L21/285;H01L21/304;H01L21/3065;H01L21/3205;H01L21/677;H01L21/68;(IPC1-7):H01L21/00 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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