| 摘要 |
A sintered aluminum nitride contains rare earth elements (RE) in amounts of from 3 to 10% by weight in terms of RE2O3, alkaline earth elements (R) in amounts of from 0.3 to 3.0% by weight in terms of RO, and silicon atoms in an amount of from 0.3 to 1.0% by weight in terms of SiO2, the grain boundaries of AlN crystals being chiefly a YAG type crystalline phase. The sintered product is obtained by firing at a temperature as low as 1700 DEG C. or lower, has a thermal conductivity of not smaller than 60 W/m.K, loses weight in an amount of not more than 10 mg/cm2 when it is left to stand in a 4N NaOH aqueous solution maintained at 70 DEG C. for one hour, and exhibits excellent resistance against the alkalis.
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