发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND PATTERN FORMING METHOD BY USING THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain a photosensitive resin composition capable of forming a pattern superior in heat resistance and electric and mechanical properties on a substrate low in heat resistance by containing a polymide resin soluble in an organic solvent and a specified photopolymerizable unsaturated compound. SOLUTION: This photosensitive resin composition contains the polyimide resin soluble in an organic solvent the photopolymerizable unsaturated compound and a photoppolymerization initiator. The photopolymerizable unsaturated compound is an epoxy acrylate or (meth)acrylic acid having >=3 (meth)acryloyl groups in one molecule. The polyimide resin is, preferably, the ones obtainable from aromatic tetracarboxylic acids and aromatic diamines, for example, the polyimide resin having benzophenonetetracarboxylic acid residues as constituents represented by the formula in which X is an optionally substituted arylene group.
申请公布号 JPH1152572(A) 申请公布日期 1999.02.26
申请号 JP19970214852 申请日期 1997.08.08
申请人 FUJITSU LTD 发明人 HAYASHI NOBUYUKI;MACHIDA HIROYUKI;TANI MOTOAKI
分类号 G03F7/004;C08F2/44;C08L79/08;G03F7/027;G03F7/037;G03F7/038;G03F7/09;G03F7/40;H01L21/027;H01L21/312;(IPC1-7):G03F7/038 主分类号 G03F7/004
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