发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device provided with the rectification characteristics of a low ON voltage, high breakdown strength and a small leakage current capable of a high speed operation. SOLUTION: Recessed parts 12 are formed on the surface of a silicon substrate 11 of an N type and low impurity concentration, an anode area 13 is formed between them and the cut-off area 14 of a P type and high impurity concentration is formed at the bottom part of the recessed part 12. An anode electrode 18 composed of a metallic material for forming a Schottky junction with the anode area 13 is provided, and the cut-off area 14 is connected to the anode electrode by a metallic film 15 formed on the inner surface of the recessed part 12. On the surface on the opposite side of the silicon substrate 11, a cathode area 16 of the N type and the high impurity concentration and a cathode electrode 17 on it are formed.
申请公布号 JPH11112005(A) 申请公布日期 1999.04.23
申请号 JP19970268459 申请日期 1997.10.01
申请人 NGK INSULATORS LTD 发明人 TERASAWA YOSHIO;SEKIYA TAKAYUKI;IMANISHI YUICHIRO
分类号 H01L29/872;H01L29/47;H01L29/861;(IPC1-7):H01L29/861 主分类号 H01L29/872
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