Inspection apparatus

摘要

An inspection method and apparatus for detecting defects or haze of a sample, includes illuminating light to the sample from an oblique direction relative to a surface of the sample with an illuminator, detecting first scattered light at a forward position relative to an illuminating direction from the sample with a first detector, detecting second scattered light at a sideward or backward position relative to the illuminating direction from the sample with a second detection, and processing a first signal of the first scattered light and a second signal of the second scattered light with different weighting for the first signal and for the second signal with a processor.

主权项

1. An inspection method for detecting defects or haze of a sample, comprising the steps of:
illuminating light to the sample from an oblique direction relative to a surface of the sample; detecting first forward scattered light scattering toward a forward direction relative to an illuminating direction from the sample to generate a first signal; detecting second sideward or backward scattered light scattering toward a sideward or backward direction relative to the illuminating direction from the sample to generate a second signal; and assigning a first weighting to the first-signal of the first forward scattered light and a second weighting to the second signal of the second sideward or backward scattered light based on signal characteristics of the first signal and the second signal.