发明名称 SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING SEMICONDUCTOR DEVICE
摘要 The reliability of a transistor including an oxide semiconductor can be improved by suppressing a change in electrical characteristics. A transistor included in a semiconductor device includes a first oxide semiconductor film over a first insulating film, a gate insulating film over the first oxide semiconductor film, a second oxide semiconductor film over the gate insulating film, and a second insulating film over the first oxide semiconductor film and the second oxide semiconductor film. The first oxide semiconductor film includes a channel region in contact with the gate insulating film, a source region in contact with the second insulating film, and a drain region in contact with the second insulating film. The second oxide semiconductor film has a higher carrier density than the first oxide semiconductor film.
申请公布号 WO2016189411(A1) 申请公布日期 2016.12.01
申请号 WO2016IB52758 申请日期 2016.05.13
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KOEZUKA, Junichi;JINTYOU, Masami;SHIMA, Yukinori
分类号 H01L21/336;G02F1/1333;G02F1/1368;G09F9/30;H01L29/786;H01L51/50;H05B33/14 主分类号 H01L21/336
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