WAFER SHEET STRETCHING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a small-sized wafer sheet stretching equipment, having little structural redundancy. SOLUTION: A pulley 21 fixed to the output shaft 4a of a motor 4 is linked, via a first drive belt 22, with an annular pulley 18 fixed to a retaining ring 7 and a base 17 via bearings 19, 20. The annular pulley 18 is linked with a pulley 15 of a screw shaft 14 via a second drive belt 23. Relative rotation between the retaining ring 7 and the base 17 is selectively obstructed by using a rod 24b of an electromagnetic solenoid 24. Thereby the device force of the motor 4 is selectively supplied to a stretching mechanism 2 and a rotating mechanism 3.